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Method Enhance Polysilicon Deposition Using Silicone Tubing
NH IRC: Design, Development, and Demonstration of a Non-equilibrium Atmospheric or Near Atmospheric Pressure Reactive Plasma Device
NH IRC: Protype Process For Polysilicon Deposition
NHIRC: Plasma CVD Process For Silicon Nitride Thin Films
NHIRC: Prototype Process for Poly-Silicon Chemcial Vapor Deposition on Silicon Tubes
Poly-Silicon Deposition on Prototype Reactor
