NHIRC: Plasma CVD Process For Silicon Nitride Thin Films

Grant

Date/time Interval

  • July 1, 2001 - June 30, 2003

    • Awarded By

    Sponsor Award Id

  • 911937931

    • Local Award Id

  • 02-786

    • Contributor

  • Amato-Wierda, Carmela   Principal Investigator