NHIRC: Prototype Process for Poly-Silicon Chemcial Vapor Deposition on Silicon Tubes

Grant

Date/time Interval

  • March 16, 2004 - December 31, 2004

    • Awarded By

    Sponsor Award Id

  • 911937931

    • Local Award Id

  • 04-568

    • Contributor

  • Amato-Wierda, Carmela   Principal Investigator