Method Enhance Polysilicon Deposition Using Silicone Tubing

Grant

Date/time Interval

  • July 1, 2000 - June 30, 2002

    • Awarded By

    Sponsor Award Id

  • 911937931

    • Local Award Id

  • 01-464

    • Contributor

  • Amato-Wierda, Carmela   Principal Investigator