Uncertainty quantification in polysilicon MEMS through on-chip testing and reduced-order modelling

Conference Paper

View record in Web of Science ®

Authors

Eftekhar Azam, Yashar

Mirzazadeh, Ramin

Azam, Saeed Eftekhar

Ansen, Eelco J

Mariani, Stefano

IEEE

Status

published

Publication Date

2017

Published In

2017 18TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) Journal

Presented At Event

2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Conference

Digital Object Identifier (doi)

https://doi.org/10.1109/eurosime.2017.7926242

Start Page

1

End Page

8