Chemical vapor deposition of Ti-W-C thin films

Academic Article

Authors

Status

Publication Date

  • December 3, 2001

    • Has Subject Area

    Published In

    Keywords

  • CH4
  • Ti
  • TiCl4
  • W(CO)(6)
  • WC
  • chemical vapor deposition
  • hard coatings

    • Digital Object Identifier (doi)

    Start Page

  • 262

    • End Page

  • 267

    • Volume

  • 148

    • Issue

  • 2-3