Kinetics and mechanism relevant to TiSiN chemical vapor deposition from TDMAT, silane and ammonia

Academic Article

Authors

Status

Publication Date

  • December 3, 2001

    • Has Subject Area

    Published In

    Keywords

  • Ti-Si-N
  • kinetics
  • molecular beam mass spectrometer
  • silane
  • tetrakis(dimethylamino) titanium

    • Digital Object Identifier (doi)

    Start Page

  • 251

    • End Page

  • 255

    • Volume

  • 148

    • Issue

  • 2-3