Sheet metal forming often consists of bending processes in which gradients of deformation exists through the thickness of the workpiece in a localized deformation area. In microscale bending, these deformation gradients become much steeper, as the changes in the deformation occur over short distances (in the order of micrometers). In addition, with miniaturization, the number of grains that are present through the thickness decreases significantly. In this research, the effect of grain size and specimen size on the deformation distribution through the thickness of microbent sheet specimens was investigated via microhardness evaluations. It was found that the deformation distribution, i.e., hardness profile, is not affected significantly by the grain size when the sheet thickness is large (for 1.625 mm specimens) or by miniaturization of the specimen size when the grain size is fine. However, the deformation distribution of the coarse grained specimens deviates from the fine grained ones and from the 1.625 mm thick sheet specimens when the specimen size is miniaturized.