A micro-scale plasma spectrometer for space and plasma edge applications (invited).

Academic Article


  • A plasma spectrometer design based on advances in lithography and microchip stacking technologies is described. A series of curved plate energy analyzers, with an integrated collimator, is etched into a silicon wafer. Tests of spectrometer elements, the energy analyzer and collimator, were performed with a 5 keV electron beam. The measured collimator transmission and energy selectivity were in good agreement with design targets. A single wafer element could be used as a plasma processing or fusion first wall diagnostic.
  • Authors

  • Scime, EE
  • Keesee, Amy
  • Dugas, M
  • Ellison, S
  • Tersteeg, J
  • Wagner, G
  • Barrie, A
  • Rager, A
  • Elliott, D
  • Status

    Publication Date

  • November 2016
  • Has Subject Area

    Published In

    Digital Object Identifier (doi)

    Pubmed Id

  • 27910531
  • Start Page

  • 11D302
  • Volume

  • 87
  • Issue

  • 11