Silane activation by Ti(NMe2)(4) and NH3 during chemical vapor deposition of Ti-Si-N films

Academic Article

Authors

  • Amato-Wierda, Carmela
  • Norton, ET
  • Wierda, DA

    • Status

    Publication Date

  • October 1999

    • Has Subject Area

    Published In

    Digital Object Identifier (doi)

    Start Page

  • 2775

    • End Page

  • 2779

    • Volume

  • 11

    • Issue

  • 10