Low-temperature chemical vapor deposition of titanium nitride thin films.

Conference Paper

Authors

  • Amato-Wierda, Carmela
  • Wierda, DA
  • Norton, ET

    • Status

    Publication Date

  • March 26, 2000

    • Published In

    Start Page

  • U831

    • End Page

  • U831

    • Volume

  • 219