Detection of plasma-induced, nanoscale dielectric constant variations in carbon-doped CVD oxides by electrostatic force microscopy

Academic Article

Authors

  • Gross, Todd
  • Soucy, KG
  • Andideh, E
  • Chamberlin, Kent
  • Status

    Publication Date

  • April 7, 2002
  • Has Subject Area

    Published In

    Digital Object Identifier (doi)

    Start Page

  • 723
  • End Page

  • 728
  • Volume

  • 35
  • Issue

  • 7