Interfacial sliding in Cu/Ta/polyimide high density interconnects as a result of thermal cycling

Conference Proceeding

Authors

  • Zhmurkin, DV
  • Gross, Todd
  • Buchwalter, LP
  • Status

    Publication Date

  • 1996
  • International Standard Book Number (isbn) 10

  • 0-87339-373-2
  • Start Page

  • 255
  • End Page

  • 270