Use of electric force microscopy to detect process-induced, nanoscale dielectric damage of low k oxides

Conference Proceeding

Authors

  • Gross, Todd
  • Soucy, KG
  • IEEE
  • IEEE
  • Status

    Publication Date

  • 2001
  • Digital Object Identifier (doi)

    International Standard Book Number (isbn) 10

  • 0-7803-6678-6
  • Start Page

  • 241
  • End Page

  • 243