Nanoscale observation of dielectric damage to low k MSQ interconnects from reactive ion etching and ash treatment

Conference Proceeding

Authors

  • Gross, Todd
  • Yao, SN
  • Status

    Publication Date

  • 2005
  • International Standard Book Number (isbn) 10

  • 1-55899-816-0
  • Start Page

  • 165
  • End Page

  • 169
  • Volume

  • 863