Observation of heterogeneous, nanoscale deformation on damascene interconnects with a polymeric dielectric

Conference Paper

View record in Web of Science ®

Authors

Gross, TS

bin Kamsah, N

Tsukrov, Igor

IEEE

IEEE

Status

published

Publication Date

2001

Published In

PROCEEDINGS OF THE IEEE 2001 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE Journal

Presented At Event

Proceedings of the IEEE 2001 International Interconnect Technology Conference Conference

Digital Object Identifier (doi)

https://doi.org/10.1109/iitc.2001.930059

International Standard Book Number (isbn) 10

0-7803-6678-6

Start Page

198

End Page

200