NONINVASIVE MEASUREMENT OF ION CURRENTS IN PLASMA ASSISTED PROCESSES USING AN OPTICAL FIBER FARADAY RING AMMETER

Conference Proceeding

Authors

  • GUENTHER, KH
  • SAXENA, I
  • Torbert, Roy
  • Status

    Publication Date

  • 1990
  • Presented At Event

    Digital Object Identifier (doi)

    International Standard Book Number (isbn) 10

  • 0-8194-0313-X
  • Start Page

  • 125
  • End Page

  • 129
  • Volume

  • 1266